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Ion implanted dopants in GaN and AlN: Lattice sites, annealing behavior, and defect recovery
Autores principales: | Ronning, C R, Dalmer, M, Uhrmacher, M, Restle, M, Vetter, U, Ziegeler, L, Hofsäss, H C, Gehrke, T, Järrendahl, K, Davis, R F |
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Lenguaje: | eng |
Publicado: |
2000
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1063/1.372154 http://cds.cern.ch/record/467861 |
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