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XPS analysis of the activation process in non-evaporable getter thin films
The surface activation process of sputter-coated non-evaporable getter (NEG) thin films based on Ti-Zr and Ti-Zr-V alloys has been studied in situ by means of X-ray photoelectron spectroscopy. After exposure of the NEG thin films to ambient air they become reactivated after a thermal treatment in an...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
2000
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| Acceso en línea: | https://dx.doi.org/10.1002/1096-9918(200008)30:1<623::AID-SIA719>3.0.CO;2-Y http://cds.cern.ch/record/471531 |