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Influence of the elemental composition and crystal structure on the vacuum properties of Ti-Zr-V non-evaporable getter films
Non-evaporable thin film getters based on the elements of the 4th and 5th columns of the periodic table have been deposited by sputtering. Among the about 20 alloys studied to date, the lowest activation temperature (about 180 °C for a 24-hour heating) has been found for the Ti-Zr-V system in a well...
| Autores principales: | , , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2001
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1116/1.1414122 http://cds.cern.ch/record/512680 |