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Emission Channeling Investigation of Implantation Defects and Impurities in II-VI-Semiconductors
Detailed knowledge on the behaviour of implantation damage and its influence on the lattice position and environment of implanted dopants in II-VI-compound semiconductors is necessary for a clear interpretation of results from other investigation methods and finally for technical utilization. Beside...
Autores principales: | , , , , , , |
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Lenguaje: | eng |
Publicado: |
2002
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/5322 |