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Ion Sources for Nanofabrication and High Resolution Lithography
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
2001
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/554652 |
| _version_ | 1780898736908533760 |
|---|---|
| author | Melngailis, J |
| author_facet | Melngailis, J |
| author_sort | Melngailis, J |
| collection | CERN |
| id | cern-554652 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2001 |
| record_format | invenio |
| spelling | cern-5546522019-09-30T06:29:59Zhttp://cds.cern.ch/record/554652engMelngailis, JIon Sources for Nanofabrication and High Resolution LithographyAccelerators and Storage Ringsoai:cds.cern.ch:5546522001 |
| spellingShingle | Accelerators and Storage Rings Melngailis, J Ion Sources for Nanofabrication and High Resolution Lithography |
| title | Ion Sources for Nanofabrication and High Resolution Lithography |
| title_full | Ion Sources for Nanofabrication and High Resolution Lithography |
| title_fullStr | Ion Sources for Nanofabrication and High Resolution Lithography |
| title_full_unstemmed | Ion Sources for Nanofabrication and High Resolution Lithography |
| title_short | Ion Sources for Nanofabrication and High Resolution Lithography |
| title_sort | ion sources for nanofabrication and high resolution lithography |
| topic | Accelerators and Storage Rings |
| url | http://cds.cern.ch/record/554652 |
| work_keys_str_mv | AT melngailisj ionsourcesfornanofabricationandhighresolutionlithography |