Cargando…

Ion Sources for Nanofabrication and High Resolution Lithography

Detalles Bibliográficos
Autor principal:	Melngailis, J
Lenguaje:	eng
Publicado:	2001
Materias:	Accelerators and Storage Rings
Acceso en línea:	http://cds.cern.ch/record/554652

Ejemplares similares

Development of ion sources for ion projection lithography
por: Lee, Y, et al.
Publicado: (1996)

Multicusp Ion Source for Ion Projection Lithography
por: Lee, Y, et al.
Publicado: (1999)

Multicusp sources for ion beam lithography applications
por: Leung, K N, et al.
Publicado: (1995)

Nanoimprint lithography: an enabling process for nanofabrication
por: Zhou, Weimin
Publicado: (2013)

Desktop Nanofabrication with Massively Multiplexed Beam Pen Lithography
por: Liao, Xing, et al.
Publicado: (2013)

Laser ion sources for highly charged ions
por: Sherwood, T R
Publicado: (1992)

Laser ion sources for highly charged ions
por: Sherwood, T R
Publicado: (1992)

High-Throughput Nanofabrication of Infra-red and Chiral Metamaterials using Nanospherical-Lens Lithography
por: Chang, Yun-Chorng, et al.
Publicado: (2013)

SCALPEL: Projection Electron Beam Lithography
por: Harriott, L R
Publicado: (1999)

Highly charged ion production in ECR source of heavy ions
por: Shirkov, G D
Publicado: (1994)

Highly charged ion production in ECR source of heavy ions
por: Shirkov, G.
Publicado: (1994)

Workshop on compact storage-ring technology : Applications to lithography
por: Collective
Publicado: (1986)

Proton and Ion Sources for High Intensity Accelerators
por: Scrivens, R
Publicado: (2004)

High current short pulse ion sources
por: Leung, K N
Publicado: (1996)

Ion sources for high-power hadron accelerators
por: Faircloth, Dan
Publicado: (2013)

Ion sources
por: Haseroth, H, et al.
Publicado: (1992)

Ion sources
por: Haseroth, Helmut, et al.
Publicado: (1992)

Ion sources
por: Angert, N
Publicado: (1994)

Ion sources
por: Angert, N
Publicado: (1985)

ECR ion source for high current linac
por: Cui Bao Qun, et al.
Publicado: (2002)

Ion sources for heavy ion fusion
por: Yu, S S, et al.
Publicado: (1996)

Laser ion sources
por: Kluge, H J, et al.
Publicado: (1985)

Fundamental processes determining the highly charged ion production in ECR ion sources
por: Shirkov, G D
Publicado: (1992)

Improvement of highly charged ion output from an ECR source of heavy ions
por: Shirkov, G D
Publicado: (1995)

Physical mechanisms leading to high currents of highly charged ions in laser-driven ion sources
por: Haseroth, H, et al.
Publicado: (1996)

High-Efficiency Target-Ion Sources for RIB Generation
por: Alton, G D
Publicado: (2001)

High-Efficiency Matching Network for RF-Driven Ion Sources
por: Staples, J W, et al.
Publicado: (2001)

High charge-state ion beam production from a laser ion source
por: Bourgeois, M, et al.
Publicado: (1996)

High-frequency heating of electrons in ECR ion sources
por: Tzenov, Stephan I
Publicado: (1990)

High-current electron and ion sources based on ferroelectrics switching
por: Boimond, D, et al.
Publicado: (1993)

Laser ion source development for heavy ions
por: Haseroth, H, et al.
Publicado: (1997)

High ion charge states in a high-current, short-pulse, vacuum arc ion source
por: Anders, A, et al.
Publicado: (1995)

Laser Ion Source Development for Heavy Ions
por: Haseroth, H, et al.
Publicado: (1996)

High-charge state ion beam production from a laser ion source
por: Bourgeois, Μ, et al.
Publicado: (1996)

Production of ion beams with the use of ECR ion sources
por: Pivarc, J, et al.
Publicado: (1997)

Ion and electron sources
por: Hill, C E
Publicado: (1994)

Peristaltic ion source
por: Brown, I G, et al.
Publicado: (1995)

Handbook of ion sources
por: Wolf, Bernhard H
Publicado: (1995)

Requirements for Ion Sources
por: Scrivens, R
Publicado: (2014)

Classification of Ion Sources
por: Scrivens, R.
Publicado: (2014)

Cannot write session to /tmp/vufind_sessions/sess_2v7v87chq4frn1g1h64207dlkp