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The Activation of Non-evaporable Getters Monitored by AES, XPS, SSIMS and Secondary Electron Yield Measurements

In this thesis the potential of the three classical surface analysis techniques Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and static secondary ion mass spectrometry (SSIMS) for the characterisation of non-evaporable getter (NEG) materials is assessed and artefacts are...

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Detalles Bibliográficos
Autor principal: Scheuerlein, C
Lenguaje:eng
Publicado: CERN 2002
Materias:
Acceso en línea:http://cds.cern.ch/record/559240