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The Activation of Non-evaporable Getters Monitored by AES, XPS, SSIMS and Secondary Electron Yield Measurements
In this thesis the potential of the three classical surface analysis techniques Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and static secondary ion mass spectrometry (SSIMS) for the characterisation of non-evaporable getter (NEG) materials is assessed and artefacts are...
Autor principal: | Scheuerlein, C |
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Lenguaje: | eng |
Publicado: |
CERN
2002
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/559240 |
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