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Process control strategy of the silicon sensors production for the CMS tracker
In the framework of the CMS experiment, a quality control of the silicon sensors production has been developed for the tracker construction. The emphasis here is on the process stability control based on the characterization of test-structures made of eight different components. The measurements car...
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
2002
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1016/S0168-9002(02)01469-9 http://cds.cern.ch/record/623194 |