Process control strategy of the silicon sensors production for the CMS tracker

In the framework of the CMS experiment, a quality control of the silicon sensors production has been developed for the tracker construction. The emphasis here is on the process stability control based on the characterization of test-structures made of eight different components. The measurements car...

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Detalles Bibliográficos
Autores principales: Fontaine, J C, Bergauer, T, Helleboid, J M, Krammer, M, Macchiolo, A
Lenguaje:eng
Publicado: 2002
Materias:
Detectors and Experimental Techniques
Acceso en línea:https://dx.doi.org/10.1016/S0168-9002(02)01469-9
http://cds.cern.ch/record/623194
Descripción
Sumario:In the framework of the CMS experiment, a quality control of the silicon sensors production has been developed for the tracker construction. The emphasis here is on the process stability control based on the characterization of test-structures made of eight different components. The measurements carried out are presented. Then the set-up and the software developed for this purpose are explained. The first results, including the ones obtained on faulty batches of sensors, are shown.

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