Cargando…
Influence of the substrate coating temperature on the vacuum properties of Ti-Zr-V non-evaporable getter films
Non-evaporable thin film getters of various compositions have been produced by sputtering. Among about 20 materials which have been studied, the lowest activation temperature (about 180 degree C) has been displayed by a Ti-Zr-V coating obtained from a cathode made of intertwisted elemental wires. In...
| Autores principales: | , , , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
2003
|
| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1016/S0042-207X(02)00755-8 http://cds.cern.ch/record/624590 |