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Handbook of thin film deposition processes and techniques: principles, methods, equipment and applications
New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued...
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| Lenguaje: | eng |
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Noyes
2002
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| Acceso en línea: | http://cds.cern.ch/record/627936 |