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Lattice location of implanted Ag in Si

The lattice location of implanted silver in Si was studied by means of the emission channeling technique. Following 60 keV room temperature implantation of radioactive $^{111}$Ag at a dose of 2-3 $\times 10^{12}$ cm$^{-2}$, we identify around 30% of Ag on near-substitutional sites (around 0.45 from...

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Detalles Bibliográficos
Autores principales: Wahl, U, Correia, J G, Vantomme, A
Lenguaje:eng
Publicado: 2003
Materias:
Acceso en línea:https://dx.doi.org/10.1016/S0168-583X(01)01191-0
http://cds.cern.ch/record/638441