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Handbook of chemical vapor deposition: principles, technology and applications

Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now es...

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Detalles Bibliográficos
Autor principal: Pierson, Hugh O
Lenguaje:eng
Publicado: Noyes 1999
Materias:
Acceso en línea:http://cds.cern.ch/record/643994