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Study of Edge Effects in the Breakdown Process of p+ on n-bulk Silicon Diodes
The paper describes the role of the n+ edge implants in the breakdown process of p+ on n-bulk silicon diodes. Laboratory measurements and simulation studies are presented on a series of test structures aimed at an optimisation of the design in the edge region. The dependence of the breakdown voltage...
Autores principales: | , , , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
1998
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/687584 |