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Quality Tests of Double-Sided Silicon Strip Detectors
The quality of the SiO2 insulator (AC coupling between metal and implanted strips) of double-sided Silicon strip detectors has been studied by using a probe station. Some tests performed on 23 wafers are described and the results are discussed. <br> <h2>Remark</h2> This note seems...
Autores principales: | , , , , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
1997
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/689230 |