Quality Tests of Double-Sided Silicon Strip Detectors

The quality of the SiO2 insulator (AC coupling between metal and implanted strips) of double-sided Silicon strip detectors has been studied by using a probe station. Some tests performed on 23 wafers are described and the results are discussed. <br> <h2>Remark</h2> This note seems...

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Detalles Bibliográficos
Autores principales: Cambon, T, Coffin, J P, Fintz, P, Guillaume, G, Jundt, F, Kuhn, C, Lutz, Jean Robert, Pagès, P, Pozdniakov, S, Rami, F, Sparavec, K, Dulinski, W, Arnold, L
Lenguaje:eng
Publicado: 1997
Materias:
Detectors and Experimental Techniques
Acceso en línea:http://cds.cern.ch/record/689230
Descripción
Sumario:The quality of the SiO2 insulator (AC coupling between metal and implanted strips) of double-sided Silicon strip detectors has been studied by using a probe station. Some tests performed on 23 wafers are described and the results are discussed. <br> <h2>Remark</h2> This note seems to cause problems with ghostview but it can be printed without any problem.

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