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Manufacturing of pixel detectors at Tesla SEZAM
Tesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced senso...
| Autores principales: | , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2002
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/706347 |