Manufacturing of pixel detectors at Tesla SEZAM

Tesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced senso...

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Detalles Bibliográficos
Autores principales: Frys, M, Kapsia, S, Spetik, Z, Sezam, T, Radhostem, R P, Jurka, V, Vrba, V
Lenguaje:eng
Publicado: 2002
Materias:
Detectors and Experimental Techniques
Acceso en línea:http://cds.cern.ch/record/706347
Descripción
Sumario:Tesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced sensors are presented. (14 refs).

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