Manufacturing of pixel detectors at Tesla SEZAM

Tesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced senso...

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Detalles Bibliográficos
Autores principales: Frys, M, Kapsia, S, Spetik, Z, Sezam, T, Radhostem, R P, Jurka, V, Vrba, V
Lenguaje:eng
Publicado: 2002
Materias:
Detectors and Experimental Techniques
Acceso en línea:http://cds.cern.ch/record/706347
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author Frys, M
Kapsia, S
Spetik, Z
Sezam, T
Radhostem, R P
Jurka, V
Vrba, V
author_facet Frys, M
Kapsia, S
Spetik, Z
Sezam, T
Radhostem, R P
Jurka, V
Vrba, V
author_sort Frys, M
collection CERN
description Tesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced sensors are presented. (14 refs).
id cern-706347
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2002
record_format invenio
spelling cern-7063472019-09-30T06:29:59Zhttp://cds.cern.ch/record/706347engFrys, MKapsia, SSpetik, ZSezam, TRadhostem, R PJurka, VVrba, VManufacturing of pixel detectors at Tesla SEZAMDetectors and Experimental TechniquesTesla SEZAM is one of the producers of pixel detectors for the ATLAS experiment at CERN. In the present paper specific design features of sensors and basic processing steps for the manufacturing of sensor structures are described. Electrical characteristics illustrating the quality of produced sensors are presented. (14 refs).oai:cds.cern.ch:7063472002
spellingShingle Detectors and Experimental Techniques
Frys, M
Kapsia, S
Spetik, Z
Sezam, T
Radhostem, R P
Jurka, V
Vrba, V
Manufacturing of pixel detectors at Tesla SEZAM
title Manufacturing of pixel detectors at Tesla SEZAM
title_full Manufacturing of pixel detectors at Tesla SEZAM
title_fullStr Manufacturing of pixel detectors at Tesla SEZAM
title_full_unstemmed Manufacturing of pixel detectors at Tesla SEZAM
title_short Manufacturing of pixel detectors at Tesla SEZAM
title_sort manufacturing of pixel detectors at tesla sezam
topic Detectors and Experimental Techniques
url http://cds.cern.ch/record/706347
work_keys_str_mv AT frysm manufacturingofpixeldetectorsatteslasezam
AT kapsias manufacturingofpixeldetectorsatteslasezam
AT spetikz manufacturingofpixeldetectorsatteslasezam
AT sezamt manufacturingofpixeldetectorsatteslasezam
AT radhostemrp manufacturingofpixeldetectorsatteslasezam
AT jurkav manufacturingofpixeldetectorsatteslasezam
AT vrbav manufacturingofpixeldetectorsatteslasezam

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