Cargando…
New turbomolecular pump with central opening for free axial access
Standard turbomolecular pumps show typically one annular active intake area on the high vacuum flange side (single-flow pumps). The central circular part of the inlet of the compressor turbine is blind for pumping. The new design proposes a central opening of a turbomolecular pump all along the axis...
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
2004
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/712716 |