Cargando…
Enabling technology for MEMS and nanodevices
| Autores principales: | , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Wiley
2004
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/791764 |
| _version_ | 1780904551319076864 |
|---|---|
| author | Baltes, Henry Brand, Oliver Fedder, G K |
| author_facet | Baltes, Henry Brand, Oliver Fedder, G K |
| author_sort | Baltes, Henry |
| collection | CERN |
| id | cern-791764 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2004 |
| publisher | Wiley |
| record_format | invenio |
| spelling | cern-7917642021-04-22T02:27:53Zhttp://cds.cern.ch/record/791764engBaltes, HenryBrand, OliverFedder, G KEnabling technology for MEMS and nanodevicesEngineeringWileyoai:cds.cern.ch:7917642004 |
| spellingShingle | Engineering Baltes, Henry Brand, Oliver Fedder, G K Enabling technology for MEMS and nanodevices |
| title | Enabling technology for MEMS and nanodevices |
| title_full | Enabling technology for MEMS and nanodevices |
| title_fullStr | Enabling technology for MEMS and nanodevices |
| title_full_unstemmed | Enabling technology for MEMS and nanodevices |
| title_short | Enabling technology for MEMS and nanodevices |
| title_sort | enabling technology for mems and nanodevices |
| topic | Engineering |
| url | http://cds.cern.ch/record/791764 |
| work_keys_str_mv | AT balteshenry enablingtechnologyformemsandnanodevices AT brandoliver enablingtechnologyformemsandnanodevices AT feddergk enablingtechnologyformemsandnanodevices |