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Enabling technology for MEMS and nanodevices

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Detalles Bibliográficos
Autores principales:	Baltes, Henry, Brand, Oliver, Fedder, G K
Lenguaje:	eng
Publicado:	Wiley 2004
Materias:	Engineering
Acceso en línea:	http://cds.cern.ch/record/791764

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