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A novel low noise hydrogenated amorphous silicon pixel detector
Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, wh...
Autores principales: | , , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2004
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/j.jnoncrysol.2004.03.078 http://cds.cern.ch/record/816641 |