A novel low noise hydrogenated amorphous silicon pixel detector

Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, wh...

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Detalles Bibliográficos
Autores principales: Moraes, D, Anelli, G, Despeisse, M, Dissertori, G, Garrigos, A, Jarron, P, Kaplon, J, Miazza, C, Shah, A, Viertel, Gert M, Wyrsch, N
Lenguaje:eng
Publicado: 2004
Materias:
Detectors and Experimental Techniques
Acceso en línea:https://dx.doi.org/10.1016/j.jnoncrysol.2004.03.078
http://cds.cern.ch/record/816641
Descripción
Sumario:Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles from **6**3Ni and **9**0Sr sources was performed.

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