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A novel low noise hydrogenated amorphous silicon pixel detector
Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, wh...
Autores principales: | , , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2004
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/j.jnoncrysol.2004.03.078 http://cds.cern.ch/record/816641 |
_version_ | 1780905418658152448 |
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author | Moraes, D Anelli, G Despeisse, M Dissertori, G Garrigos, A Jarron, P Kaplon, J Miazza, C Shah, A Viertel, Gert M Wyrsch, N |
author_facet | Moraes, D Anelli, G Despeisse, M Dissertori, G Garrigos, A Jarron, P Kaplon, J Miazza, C Shah, A Viertel, Gert M Wyrsch, N |
author_sort | Moraes, D |
collection | CERN |
description | Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles from **6**3Ni and **9**0Sr sources was performed. |
id | cern-816641 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2004 |
record_format | invenio |
spelling | cern-8166412019-09-30T06:29:59Zdoi:10.1016/j.jnoncrysol.2004.03.078http://cds.cern.ch/record/816641engMoraes, DAnelli, GDespeisse, MDissertori, GGarrigos, AJarron, PKaplon, JMiazza, CShah, AViertel, Gert MWyrsch, NA novel low noise hydrogenated amorphous silicon pixel detectorDetectors and Experimental TechniquesFirsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles from **6**3Ni and **9**0Sr sources was performed.oai:cds.cern.ch:8166412004 |
spellingShingle | Detectors and Experimental Techniques Moraes, D Anelli, G Despeisse, M Dissertori, G Garrigos, A Jarron, P Kaplon, J Miazza, C Shah, A Viertel, Gert M Wyrsch, N A novel low noise hydrogenated amorphous silicon pixel detector |
title | A novel low noise hydrogenated amorphous silicon pixel detector |
title_full | A novel low noise hydrogenated amorphous silicon pixel detector |
title_fullStr | A novel low noise hydrogenated amorphous silicon pixel detector |
title_full_unstemmed | A novel low noise hydrogenated amorphous silicon pixel detector |
title_short | A novel low noise hydrogenated amorphous silicon pixel detector |
title_sort | novel low noise hydrogenated amorphous silicon pixel detector |
topic | Detectors and Experimental Techniques |
url | https://dx.doi.org/10.1016/j.jnoncrysol.2004.03.078 http://cds.cern.ch/record/816641 |
work_keys_str_mv | AT moraesd anovellownoisehydrogenatedamorphoussiliconpixeldetector AT anellig anovellownoisehydrogenatedamorphoussiliconpixeldetector AT despeissem anovellownoisehydrogenatedamorphoussiliconpixeldetector AT dissertorig anovellownoisehydrogenatedamorphoussiliconpixeldetector AT garrigosa anovellownoisehydrogenatedamorphoussiliconpixeldetector AT jarronp anovellownoisehydrogenatedamorphoussiliconpixeldetector AT kaplonj anovellownoisehydrogenatedamorphoussiliconpixeldetector AT miazzac anovellownoisehydrogenatedamorphoussiliconpixeldetector AT shaha anovellownoisehydrogenatedamorphoussiliconpixeldetector AT viertelgertm anovellownoisehydrogenatedamorphoussiliconpixeldetector AT wyrschn anovellownoisehydrogenatedamorphoussiliconpixeldetector AT moraesd novellownoisehydrogenatedamorphoussiliconpixeldetector AT anellig novellownoisehydrogenatedamorphoussiliconpixeldetector AT despeissem novellownoisehydrogenatedamorphoussiliconpixeldetector AT dissertorig novellownoisehydrogenatedamorphoussiliconpixeldetector AT garrigosa novellownoisehydrogenatedamorphoussiliconpixeldetector AT jarronp novellownoisehydrogenatedamorphoussiliconpixeldetector AT kaplonj novellownoisehydrogenatedamorphoussiliconpixeldetector AT miazzac novellownoisehydrogenatedamorphoussiliconpixeldetector AT shaha novellownoisehydrogenatedamorphoussiliconpixeldetector AT viertelgertm novellownoisehydrogenatedamorphoussiliconpixeldetector AT wyrschn novellownoisehydrogenatedamorphoussiliconpixeldetector |