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A novel low noise hydrogenated amorphous silicon pixel detector

Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, wh...

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Detalles Bibliográficos
Autores principales: Moraes, D, Anelli, G, Despeisse, M, Dissertori, G, Garrigos, A, Jarron, P, Kaplon, J, Miazza, C, Shah, A, Viertel, Gert M, Wyrsch, N
Lenguaje:eng
Publicado: 2004
Materias:
Acceso en línea:https://dx.doi.org/10.1016/j.jnoncrysol.2004.03.078
http://cds.cern.ch/record/816641
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author Moraes, D
Anelli, G
Despeisse, M
Dissertori, G
Garrigos, A
Jarron, P
Kaplon, J
Miazza, C
Shah, A
Viertel, Gert M
Wyrsch, N
author_facet Moraes, D
Anelli, G
Despeisse, M
Dissertori, G
Garrigos, A
Jarron, P
Kaplon, J
Miazza, C
Shah, A
Viertel, Gert M
Wyrsch, N
author_sort Moraes, D
collection CERN
description Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles from **6**3Ni and **9**0Sr sources was performed.
id cern-816641
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2004
record_format invenio
spelling cern-8166412019-09-30T06:29:59Zdoi:10.1016/j.jnoncrysol.2004.03.078http://cds.cern.ch/record/816641engMoraes, DAnelli, GDespeisse, MDissertori, GGarrigos, AJarron, PKaplon, JMiazza, CShah, AViertel, Gert MWyrsch, NA novel low noise hydrogenated amorphous silicon pixel detectorDetectors and Experimental TechniquesFirsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 mum pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles from **6**3Ni and **9**0Sr sources was performed.oai:cds.cern.ch:8166412004
spellingShingle Detectors and Experimental Techniques
Moraes, D
Anelli, G
Despeisse, M
Dissertori, G
Garrigos, A
Jarron, P
Kaplon, J
Miazza, C
Shah, A
Viertel, Gert M
Wyrsch, N
A novel low noise hydrogenated amorphous silicon pixel detector
title A novel low noise hydrogenated amorphous silicon pixel detector
title_full A novel low noise hydrogenated amorphous silicon pixel detector
title_fullStr A novel low noise hydrogenated amorphous silicon pixel detector
title_full_unstemmed A novel low noise hydrogenated amorphous silicon pixel detector
title_short A novel low noise hydrogenated amorphous silicon pixel detector
title_sort novel low noise hydrogenated amorphous silicon pixel detector
topic Detectors and Experimental Techniques
url https://dx.doi.org/10.1016/j.jnoncrysol.2004.03.078
http://cds.cern.ch/record/816641
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