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A comparison of pumping speed measurement methods
A comparison of pumping speed measurement method was made using three types of apparatus. These were: (i) the Fischer-Mommsen system, developed at CERN in which the gas flow rate is measured by the pressure drop across an orifice of known conductance at the test vessel inlet and the pressure gauge i...
Autores principales: | , |
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Lenguaje: | eng |
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1974
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1116/1.1318612 http://cds.cern.ch/record/873614 |