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Introduction to focused ion beams: instrumentation, theory, techniques and practice

The focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It h...

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Detalles Bibliográficos
Autor principal: Giannuzzi, Lucille A
Lenguaje:eng
Publicado: Springer 2005
Materias:
Acceso en línea:https://dx.doi.org/10.1007/b101190
http://cds.cern.ch/record/898845