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Introduction to focused ion beams: instrumentation, theory, techniques and practice
The focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It h...
Autor principal: | Giannuzzi, Lucille A |
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Lenguaje: | eng |
Publicado: |
Springer
2005
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1007/b101190 http://cds.cern.ch/record/898845 |
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