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Ti-Zr-V non-evaporable getter films: from development to large scale production for the Large Hadron Collider
Non-evaporable getter (NEG) alloys after dissolution of their native oxide layer into the bulk are able to pump most of the gases present in ultra-high vacuum systems. The dissolution process, commonly called activation, is obtained by heating in vacuum. NEG materials can be sputter-deposited as a t...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
2005
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| Acceso en línea: | http://cds.cern.ch/record/927753 |