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VLSI electronics: microstructure science

VLSI Electronics: Microstructure Science, Volume 4 reviews trends for the future of very large scale integration (VLSI) electronics and the scientific base that supports its development.This book discusses the silicon-on-insulator for VLSI and VHSIC, X-ray lithography, and transient response of elec...

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Detalles Bibliográficos
Autor principal: Einspruch, Norman G
Lenguaje:eng
Publicado: Academic Press 1982
Materias:
Acceso en línea:http://cds.cern.ch/record/98419