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Lattice sites of implanted Fe in Si

The angular distribution of $\beta^{-}$-particles emitted by the radioactive isotope $^{59}$Fe was monitored following implantation into Si single crystals at fluences from $1.4 \times 10^{12}$ cm$^{-2}$ to $1 \times 10^{14}$ cm$^{-2}$. We identified Fe on three distinct sites: ideal substitutional,...

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Detalles Bibliográficos
Autores principales: Wahl, Ulrich, Correia, J G, Rita, E, Araújo, João Pedro, Carvalho-Soares, José
Lenguaje:eng
Publicado: 2005
Materias:
Acceso en línea:https://dx.doi.org/10.1103/PhysRevB.72.014115
http://cds.cern.ch/record/985354