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Lattice sites of implanted Fe in Si
The angular distribution of $\beta^{-}$-particles emitted by the radioactive isotope $^{59}$Fe was monitored following implantation into Si single crystals at fluences from $1.4 \times 10^{12}$ cm$^{-2}$ to $1 \times 10^{14}$ cm$^{-2}$. We identified Fe on three distinct sites: ideal substitutional,...
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
2005
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1103/PhysRevB.72.014115 http://cds.cern.ch/record/985354 |