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Excimer Laser Technology

This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this c...

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Detalles Bibliográficos
Autores principales: Basting, Dirk, Marowsky, Gerd
Lenguaje:eng
Publicado: Springer 2005
Materias:
Acceso en línea:https://dx.doi.org/10.1007/b137894
http://cds.cern.ch/record/995309