Excimer Laser Technology

This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this c...

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Detalles Bibliográficos
Autores principales: Basting, Dirk, Marowsky, Gerd
Lenguaje:eng
Publicado: Springer 2005
Materias:
Engineering
Acceso en línea:https://dx.doi.org/10.1007/b137894
http://cds.cern.ch/record/995309
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author Basting, Dirk
Marowsky, Gerd
author_facet Basting, Dirk
Marowsky, Gerd
author_sort Basting, Dirk
collection CERN
description This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
id cern-995309
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2005
publisher Springer
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spelling cern-9953092021-04-22T02:06:33Zdoi:10.1007/b137894http://cds.cern.ch/record/995309engBasting, DirkMarowsky, GerdExcimer Laser TechnologyEngineering This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.Springeroai:cds.cern.ch:9953092005
spellingShingle Engineering
Basting, Dirk
Marowsky, Gerd
Excimer Laser Technology
title Excimer Laser Technology
title_full Excimer Laser Technology
title_fullStr Excimer Laser Technology
title_full_unstemmed Excimer Laser Technology
title_short Excimer Laser Technology
title_sort excimer laser technology
topic Engineering
url https://dx.doi.org/10.1007/b137894
http://cds.cern.ch/record/995309
work_keys_str_mv AT bastingdirk excimerlasertechnology
AT marowskygerd excimerlasertechnology

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