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3D sensors and micro-fabricated detector systems
Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors...
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| Lenguaje: | eng |
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2014
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| Acceso en línea: | https://dx.doi.org/10.1016/j.nima.2014.05.087 http://cds.cern.ch/record/2025829 |