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Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry
The internal shape and alignment of accelerator discs is crucial for efficient collider operation at the future compact linear collider (CLIC). We applied a calibrated custom-made Fourier-domain short coherence interferometer to measure the height of 40 and 60μm60 μm ultraprecisely turned steps (su...
| Autores principales: | , , , |
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| Lenguaje: | eng |
| Publicado: |
2016
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1117/1.OE.55.1.014103 http://cds.cern.ch/record/2263130 |