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Calibration of Fourier domain short coherence interferometer for absolute distance measurements
We calibrated and determined the measurement uncertainty of a custom-made Fourier domain short coherence interferometer operated in laboratory conditions. We compared the optical thickness of two thickness standards and three coverslips determined with our interferometer to the geometric thickness d...
| Autores principales: | , , , |
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| Lenguaje: | eng |
| Publicado: |
OSA
2015
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1364/AO.54.004635 http://cds.cern.ch/record/2710801 |