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Kinetic modeling of E-to-H mode transition in inductively coupled hydrogen plasmas
Radio Frequency (RF) Inductively Coupled Plasmas (ICPs) are widely known for their two discharge modes, i.e., H-mode and E-mode, where the dynamics of the plasmas are completely different from each other. We have performed a kinetic simulation of a hydrogen plasma discharge in order to clarify the d...
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
2016
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1063/1.4953647 http://cds.cern.ch/record/2267913 |