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Kinetic modeling of E-to-H mode transition in inductively coupled hydrogen plasmas

Radio Frequency (RF) Inductively Coupled Plasmas (ICPs) are widely known for their two discharge modes, i.e., H-mode and E-mode, where the dynamics of the plasmas are completely different from each other. We have performed a kinetic simulation of a hydrogen plasma discharge in order to clarify the d...

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Detalles Bibliográficos
Autores principales:	Nishida, K, Mattei, S, Mochizuki, S, Lettry, J, Hatayama, A
Lenguaje:	eng
Publicado:	2016
Materias:	Accelerators and Storage Rings
Acceso en línea:	https://dx.doi.org/10.1063/1.4953647 http://cds.cern.ch/record/2267913

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