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A process modification for CMOS monolithic active pixel sensors for enhanced depletion, timing performance and radiation tolerance
For the upgrade of its Inner Tracking System, the ALICE experiment plans to install a new tracker fully constructed with monolithic active pixel sensors implemented in a standard 180 nm CMOS imaging sensor process, with a deep pwell allowing full CMOS within the pixel. Reverse substrate bias increas...
Autores principales: | , , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2017
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/j.nima.2017.07.046 http://cds.cern.ch/record/2280552 |