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An absolute angle recovery method for dual-interferometer-based rotational stages
A new absolute angle recovery method for dual-interferometer-based rotational stages is presented. The high resolution of laser interferometers makes this sensor particularly suitable for high-precision rotational stages (comprising two parallel interferometer heads separated by a fixed distance). H...
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
2017
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1109/I2MTC.2017.7969798 http://cds.cern.ch/record/2303659 |