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Investigation of voltages and electric fields in silicon radiation detectors using a scanning electron microscope

The paper describes qualitative and quantitative methods to measure voltages and electric fields in a biased silicon p$^+$/n$^−$/n$^+$ radiation detector with a scanning electron microscope using voltage-contrast phenomenon. The contrast is converted to voltage mathematically using simple equations....

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Detalles Bibliográficos
Autor principal: Leinonen, Kari
Lenguaje:eng
Publicado: 2005
Materias:
Acceso en línea:https://dx.doi.org/10.1016/j.nima.2005.07.075
http://cds.cern.ch/record/2634250