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Determining BCP Etch Rate and Uniformity in High Luminosity LHC Crab Cavities
The compact SRF Crab Cavities required for HL-LHC have complex geometries making prediction of average and local BCP etch rates a difficult task. This paper describes a series of experiments and simulations used to determine the etch uniformity and rate within these structures. An initial experiment...
Autores principales: | , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2018
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.18429/JACoW-SRF2017-TUPB100 http://cds.cern.ch/record/2673654 |