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Determining BCP Etch Rate and Uniformity in High Luminosity LHC Crab Cavities

The compact SRF Crab Cavities required for HL-LHC have complex geometries making prediction of average and local BCP etch rates a difficult task. This paper describes a series of experiments and simulations used to determine the etch uniformity and rate within these structures. An initial experiment...

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Detalles Bibliográficos
Autores principales: Jones, Thomas, Burt, Graeme, Calaga, Rama, Capatina, Ofelia, Ferreira, Leonel, Leuxe, Raphael, Mitchell, James, Pattalwar, Shrikant, Verdú-Andrés, Silvia, Xiao, Binping
Lenguaje:eng
Publicado: 2018
Materias:
Acceso en línea:https://dx.doi.org/10.18429/JACoW-SRF2017-TUPB100
http://cds.cern.ch/record/2673654