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MEMS μ-wire magnetic field detection method@CERN
This work reports a novel construction of a micromachined MEMS magnetometer detecting static magnetic fields of CERN's reference dipole with a custom made capacitive read-out. The magnetic flux density is characterized via vibration modes of the MEMS structure which are sensed capacitively. The...
| Autores principales: | , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2016
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1109/ICSENS.2015.7370244 http://cds.cern.ch/record/2310153 |