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MEMS μ-wire magnetic field detection method@CERN

This work reports a novel construction of a micromachined MEMS magnetometer detecting static magnetic fields of CERN's reference dipole with a custom made capacitive read-out. The magnetic flux density is characterized via vibration modes of the MEMS structure which are sensed capacitively. The...

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Detalles Bibliográficos
Autores principales:	Stifter, Michael, Steiner, Harald, Hortschitz, Wilfried, Sauter, Thilo, Glatzl, Thomas, Dabsch, Alexander, Keplinger, Franz
Lenguaje:	eng
Publicado:	2016
Materias:	Detectors and Experimental Techniques
Acceso en línea:	https://dx.doi.org/10.1109/ICSENS.2015.7370244 http://cds.cern.ch/record/2310153

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