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Dose-Rate Sensitivity of 65-nm MOSFETs Exposed to Ultrahigh Doses
The radiation response of complementary metal- oxide-semiconductor (CMOS) gate oxides is typically insensitive to true dose-rate effects, but damage in deep-sub-micrometer technologies is dominated by ionization mechanisms in thick isolation oxides surrounding the transistors. Recent results in 65-n...
Autores principales: | , , , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2018
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1109/TNS.2018.2828142 http://cds.cern.ch/record/2644821 |