Cargando…
Development of copper electroformed vacuum chambers with integrated non-evaporable getter thin film coatings
First results concerning a new approach of TiZrV non-evaporable getter (NEG) thin films coating on very small diameter vacuum chambers are presented. This new process is based on the electroforming of a vacuum chamber around a sacrificial mandrel, which is precoated with a NEG thin film. Aluminum wa...
Autores principales: | , , , , , , , , |
---|---|
Lenguaje: | english |
Publicado: |
2017
|
Materias: | |
Acceso en línea: | https://dx.doi.org/10.1116/1.4999539 http://cds.cern.ch/record/2694072 |