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A Novel Model of a Mode-Localized MEMS Accelerometer
In this work, a model of a microelectromechanical accelerometer with two movable beam elements located between two stationary electrodes is proposed. The action of inertia forces in the longitudinal direction leads to a change in the spectral properties of the system, which can be used as an output...
| Autores principales: | , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2020
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| Acceso en línea: | https://dx.doi.org/10.1134/S1028335820100031 http://cds.cern.ch/record/2745528 |